Chinese researchers make EUV breakthrough

(scmp.com)

7 points | by givemeethekeys 9 hours ago

2 comments

  • fjfaase 7 hours ago
    If I understand it correctly they achieved a conversion efficiency of 3.42% for a less efficient technique that is not used by ASML for producing EUV. Seems it is more like making progress than a breakthrough. A good light source is essential, but building a machine comparable with the ASML machines requires a lot of engineering in other areas as well.
    • robocat 4 hours ago
      The article seems to concentrate on efficiency, which surely isn't an important constraint in this application (for EUV light generation).

      Typically when a technology doesn't meet a critical constraint, the marketing will laud some other less important attribute.

  • faragon 7 hours ago